SAN JOSE, Calif. — Novellus Systems Inc. moved to lower the cost of chemical mechanical planarization (CMP) Monday (June 21) by rolling out a 300-mm tool that it claimed could be used down to the ...
The semiconductor industry is constantly marching toward thinner films and complex geometries with smaller dimensions, as well as newer materials. The number of chemical mechanical planarization (CMP) ...
CHANDLER, Ariz.– SpeedFam-IPEC Inc. today rolled out a suite of CMP processes for its universal tool in chemical mechanical planarization, which is called Momentum. The new processes of record cover 0 ...
BOCA RATON, Fla.--(BUSINESS WIRE)--June 28, 2005--Quartz Unlimited LLC. is offering a cost saving alternative of using reclaimed TEOS or thermal oxide dummy wafers for CMP(a) tools retaining ring ...
ACM Research Introduces New Post-CMP Cleaning Tool for Silicon and SiC Wafer Substrate Manufacturing
FREMONT, Calif., July 12, 2022 (GLOBE NEWSWIRE) -- ACM Research, Inc. (ACM) (NASDAQ: ACMR), a leading supplier of wafer processing solutions for semiconductor and advanced wafer-level packaging (WLP) ...
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