Imagine a machine so advanced it operates with light invisible to the human eye, etching circuits onto silicon wafers at scales smaller than a virus. This is the world of EUV lithography, a ...

The method of fabricating structures and devices at the nanoscale, known as nanofabrication, has resulted in major developments in several fields, such as electronics, medicine, and materials science.

TimesMachine is an exclusive benefit for home delivery and digital subscribers. About the Archive This is a digitized version of an article from The Times’s print archive, before the start of online ...